Tribology Issues and Opportunities in MEMS

Roughness optimization can help in tribological improvements. Monolayers of lubricants and other materials need to be developed for ultra-low friction and near zero wear. Hard coatings and ion implantation techniques hold promise.

Tribology Issues and Opportunities in MEMS

Tribology Issues and Opportunities in MEMS

Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The MEMS community needs to be exposed to the state-of-the-artoftribology and vice versa. Fundamental understanding of friction/stiction, wear and the role of surface contamination and environmental debris in micro devices is required. There are significantadhesion, friction and wear issues in manufacturing and actual use, facing the MEMS industry. Very little is understood about the tribology of bulk silicon and polysilicon films used in the construction ofthese microdevices. These issues are based on surface phenomenaand cannotbe scaled down linearly and these become increasingly important with the small size of the devices. Continuum theory breaks down in the analyses, e. g. in fluid flow of micro-scale devices. Mechanical properties ofpolysilicon and other films are not well characterized. Roughness optimization can help in tribological improvements. Monolayers of lubricants and other materials need to be developed for ultra-low friction and near zero wear. Hard coatings and ion implantation techniques hold promise.

More Books:

Tribology Issues and Opportunities in MEMS
Language: un
Pages: 655
Authors: Bharat Bhushan
Categories: Science
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media

Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS
Tribology Issues and Opportunities in MEMS Workshop
Language: un
Pages: 17
Authors: Bharat Bhushan, Ohio state univ columbus Dept. of mechanical engineering
Categories: Science
Type: BOOK - Published: 1998 - Publisher:

The objective of this workshop was to bring together researchers, manufacturers and potential users of MEMS and experts in tribology (including mechanics, mechanical properties and surface modification) so that the MEMS community could better understand the tribology expertise and the tribology community could better understand the major problems on hand
Tribology Issues and Opportunities in MEMS
Language: un
Pages: 655
Authors: Bharat Bhushan
Categories: Science
Type: BOOK - Published: 1998 - Publisher:

Books about Tribology Issues and Opportunities in MEMS
Journal
Language: en
Pages:
Authors: American Chemical Society
Categories: Chemistry
Type: BOOK - Published: 2002 - Publisher:

Books about Journal
MEMS Reliability for Critical and Space Applications
Language: en
Pages: 176
Authors: Russell A. Lawton
Categories: Technology & Engineering
Type: BOOK - Published: 1999 - Publisher: Society of Photo Optical

A selection of scientific papers on the reliability of microelectromechanical systems (MEMS) for critical and space applications.

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